Configuration for transporting a semiconductor wafer carrier

Details Configuration for transporting a semiconductor wafer carrier Configuration for transporting a semiconductor wafer carrier

2005-04-12

2005-04-12

Lillis, Eileen D. (Department: 3652)

Material or article handling

Plural, static structures for supporting discrete loads and...

Load-underlying members

C414S591000, C414S940000, C198S465200

Reexamination Certificate

active

06877944

ABSTRACT:
For bay type structures of semiconductor wafer transport systems, a configuration includes interbay rail tracks and intrabay rail tracks mounted on each other, vehicles of the interbay system and carrier transfer cars of the intrabay system moving freely bi-directional inside the bay area without obstructing each other. The carrier transfer car is configured such that a wafer carrier can be directly loaded from the vehicle to the load port of a processing machine. The configuration simplifies and accelerates the transfer and enhances the flexibility of vehicles in wafer transport.

REFERENCES:
patent: 5980183 (1999-11-01), Fosnight
patent: 6280134 (2001-08-01), Nering
patent: 6364593 (2002-04-01), Hofmeister et al.
patent: 6481558 (2002-11-01), Bonora et al.
patent: 6602038 (2003-08-01), Ahn et al.
patent: 20040109746 (2004-06-01), Suzuki
patent: WO 9858402 (1998-12-01), None
patent: WO 0037338 (2000-06-01), None

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