Conductor crossovers for integrated RC-circuits

Details Conductor crossovers for integrated RC-circuits Conductor crossovers for integrated RC-circuits

1979-05-21

1981-08-11

Smith, John D.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

204 15, 204 38A, 29847, 427 80, 427 96, 427101, 361410, 430317, 430318, 430319, C25D 1102, C25D 1134, H05K 306

Patent

active

042834856

ABSTRACT:
A method is disclosed for the manufacture in electric thin film R and RC circuits of a conductor crossover. A first conductor is structured at the crossover from a TaAl double layer. A portion of the top layer of the double layer is converted to a TaAl oxide and an SiO.sub.2 layer is then applied over the TaAl oxide as a double dielectric. A second conductor is then structured over the double dielectric.

REFERENCES:
patent: 3949275 (1976-04-01), Muenz
patent: 4200502 (1980-04-01), Muenz et al.
Potzlberger, "Thin Film Integrated RC-Networks with Compensated Temperature Coefficients of R and C" Electro Component Science and Technology, 1977, vol. 4, pp. 139-142.

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