Conductive micro-probe and memory device

Details Conductive micro-probe and memory device Conductive micro-probe and memory device

1997-06-09

1999-08-10

Turner, Archene

Radiant energy

Inspection of solids or liquids by charged particles

428212, 428469, 428472, 428408, 428698, 428699, G01N 700

Patent

active

059362430

ABSTRACT:
A micro-probe that has little deformation and wear while maintaining a desired conductivity is composed of a cylindrical wear resistant material and a conductive material. The wear resistant material provides mechanical contact with a contact target, while the conductive material provides an electrical contact with the contact target. The invention thus provides an ultra-small micro-probe having a long useful life, and that experiences little deformation or wear while maintaining the desired conductivity.

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patent: 5455419 (1995-10-01), Bayer et al.
patent: 5475318 (1995-12-01), Marcus et al.

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