Conductive contacts and methods for fabricating conductive...

Details Conductive contacts and methods for fabricating conductive... Conductive contacts and methods for fabricating conductive...

2008-06-24

2008-06-24

Nhu, David (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S383000, C257S762000, C257SE21006, C257SE21593

Reexamination Certificate

active

07391086

ABSTRACT:
Conductive contacts and methods for fabricating conductive contacts for electrochemical mechanical planarization are provided. A conductive contact in accordance with an exemplary embodiment of the invention includes, but is not limited to, a first conductive surface formed of a flexible material, a conductive element that is disposed remote from the first conductive surface and that is configured for electrical coupling to an external circuit, and an intermediate portion that electrically couples the first conductive surface and the conductive element.

REFERENCES:
patent: 5605488 (1997-02-01), Ohashi et al.
patent: 5853317 (1998-12-01), Yamamoto
patent: 6368190 (2002-04-01), Easter et al.
patent: 6482307 (2002-11-01), Ashjaee et al.
patent: 6736952 (2004-05-01), Emesh et al.
patent: 2005/0016861 (2005-01-01), Laursen et al.

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