Concentration graded carbon doped oxide

Details Concentration graded carbon doped oxide Concentration graded carbon doped oxide

2005-05-03

2005-05-03

Fourson, George (Department: 2823)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S789000

Reexamination Certificate

active

06887780

ABSTRACT:
A process for forming an interlayer dielectric layer is disclosed. The method comprises first forming a carbon-doped oxide (CDO) layer with a first concentration of carbon dopants therein. Next, the CDO layer is further formed with a second concentration of carbon dopants therein, wherein the first concentration is different than the second concentration.

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