Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2007-09-14
2010-02-02
Garbowski, Leigh Marie (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000
Reexamination Certificate
active
07657865
ABSTRACT:
A computer-readable recording medium recording a mask data generation program, which causes a computer to generate data of a mask illuminated by illumination light and used to form a latent image on a photoresist via a projection optical system. The program causes the computer to execute a map generation step of Fourier-transforming a function indicating an effective light source to generate a coherence map expressing a coherence distribution on an object plane of the projection optical system, on which the mask is arranged, a specifying step of specifying a reference vector from an origin of the coherence map to a region where coherence is less than a reference value, a first data generation step of selecting one element from a pattern including a plurality of elements, and removing, from the pattern, an element existing at a position matching a terminal point of the reference vector arranged such that the center of the selected element serves as a starting point, to generate data of a first pattern different from the pattern, and a second data generation step of generating data of a second pattern including the element removed in generating the data of the first pattern.
REFERENCES:
patent: 5357311 (1994-10-01), Shiraishi
patent: 7100145 (2006-08-01), Shi et al.
patent: 7107573 (2006-09-01), Yamazoe et al.
patent: 7231629 (2007-06-01), Laidig
patent: 7506299 (2009-03-01), Socha et al.
patent: 2004/0229133 (2004-11-01), Socha et al.
patent: 2005/0142470 (2005-06-01), Socha et al.
patent: 2005/0149900 (2005-07-01), Laidig
patent: 2007/0168898 (2007-07-01), Gupta et al.
patent: 2008/0070131 (2008-03-01), Yamazoe
patent: 1 237 046 (2002-09-01), None
patent: 1 239 331 (2002-09-01), None
patent: 1439420 (2004-07-01), None
patent: 1544680 (2005-06-01), None
patent: 2004-221594 (2004-08-01), None
patent: 2005-183981 (2005-07-01), None
patent: WO 01/61412 (2001-08-01), None
Extended European Search Report (including European search opinion) dated Feb. 5, 2008, mailed in a Communication dated Feb. 11, 2008, in copending European patent application No. 07 01 8089, 6 pages.
Robert Socha, et al. “Simultaneous Source Mask Optimization (SMO),” Proceedings of SPIE, vol. 5853 (2005), pp. 180-193.
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Garbowski Leigh Marie
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