Computer-implemented inter-chamber synchronization in a multiple

Details Computer-implemented inter-chamber synchronization in a multiple Computer-implemented inter-chamber synchronization in a multiple

1996-12-19

1999-08-24

Grant, William

Boots, shoes, and leggings

364146, 36446801, 36446828, 4272551, 4272555, 4272557, G05B 1101

Patent

active

059432306

ABSTRACT:
A computer-implemented method of achieving inter-chamber synchronization in a system for integrated circuit manufacturing that includes first and second chambers. In particular, the disclosed method includes terminating a second operation in a second recipe carried out in the second chamber, upon termination of a first operation in a first recipe carried out in the first chamber. Performance advantages realized by the method are illustrated for various cases including 1) a variable-length first operation; 2) a fixed-length first operation; 3) a process first recipe; 4) a conditioning first recipe; 5) a process second recipe; and 6) a conditioning second recipe.

REFERENCES:
patent: 3765763 (1973-10-01), Nygaard
patent: 3812947 (1974-05-01), Nygaard
patent: 4733631 (1988-03-01), Boyarsky et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 5105362 (1992-04-01), Kotani
patent: 5286296 (1994-02-01), Sato et al.
patent: 5357115 (1994-10-01), Asakawa et al.
patent: 5376212 (1994-12-01), Saiki
patent: 5458732 (1995-10-01), Butler et al.
patent: 5486080 (1996-01-01), Sieradzki
patent: 5512320 (1996-04-01), Turner et al.
patent: 5561669 (1996-10-01), Mozumder et al.
patent: 5578127 (1996-11-01), Kimura
patent: 5785796 (1998-07-01), Lee

Affiliated with

Also associated with

Rating

Computer-implemented inter-chamber synchronization in a multiple does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Computer-implemented inter-chamber synchronization in a multiple, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Computer-implemented inter-chamber synchronization in a multiple will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-472797