Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2006-10-31
2006-10-31
Tsai, Carol S. (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
C702S179000, C702S180000, C702S181000, C702S183000, C702S184000, C702S185000
Reexamination Certificate
active
07130767
ABSTRACT:
A computer-implemented data presentation technique for presenting a set of expected failure states of system-related constructs pertaining to a plasma processing system is disclosed. The technique includes receiving a set of indicia pertaining to a first system-related construct of said system-related constructs. The technique also includes computing, in accordance with a first sub-method and responsive to said receiving said first set of indicia, a first expected failure state value. The technique further includes computing a first normalized expected failure state value in accordance with a first weight; correlating said first normalized expected failure state value to a first color; and displaying said first color in a cell of an n-dimensional matrix, wherein n is a number greater than 1.
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Bailey III Andrew D.
Yadav Puneet
Huynh Phuong
IP Strategy Group, P.C.
Lam Research Corporation
Tsai Carol S.
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