Compound semiconductor device and method for producing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – With lattice constant mismatch

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257191, H01L 2978, H01L 3300

Patent

active

061335924

ABSTRACT:
A compound semiconductor device includes a contact structure having a plurality of layers provided on a compound semiconductor layer and an electrode provided on the contact structure. The contact structure includes a first contact layer made of In.sub.x Ga.sub.1-x As (0.9.ltoreq.x.ltoreq.1) on the side closest to the electrode.

REFERENCES:
patent: 5373185 (1994-12-01), Sato
patent: 5604356 (1997-02-01), Shiraishi
M. Hasegawa et al., Technical Report of IEICE, ED93-167, MW93-124, pp. 69-74 (1994).
B. Bayraktaroglu et al., IEEE Electron Device Letters, 14(10):493-495 (1993).

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