Compositions and processes for photolithography

Details Compositions and processes for photolithography Compositions and processes for photolithography

2011-06-07

2011-06-07

Visconti, Geraldina (Department: 1722)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S273100, C430S322000

Reexamination Certificate

active

07955778

ABSTRACT:
Overcoating layer compositions are provided that are applied above a photoresist composition including for immersion lithography processing as well as non-immersion imaging.

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European Search Report of corresponding European Application No. 07 25 0991.

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