Composition for removing an insulation material, method of...

Details Composition for removing an insulation material, method of... Composition for removing an insulation material, method of...

2006-10-02

2010-12-14

Maldonado, Julio J (Department: 2823)

Semiconductor device manufacturing: process

Chemical etching

Liquid phase etching

C438S756000, C257SE21220, C257SE21250, C216S096000, C216S103000

Reexamination Certificate

active

07851372

ABSTRACT:
In one aspect, a composition is provided which is capable of removing an insulation material which includes at least one of a low-k material and a passivation material. The composition of this aspect includes about 5 to about 40 percent by weight of a fluorine compound, about 0.01 to about 20 percent by weight of a first oxidizing agent, about 10 to about 50 percent by weight of a second oxidizing agent, and a remaining water.

REFERENCES:
patent: 5034363 (1991-07-01), Petit et al.
patent: 6017811 (2000-01-01), Winton et al.
patent: RE37972 (2003-02-01), Clark et al.
patent: 6890391 (2005-05-01), Aoki et al.
patent: 6896744 (2005-05-01), Morinaga et al.
patent: 7208325 (2007-04-01), Wang et al.
patent: 7479474 (2009-01-01), Cernat et al.
patent: 2004/0124420 (2004-07-01), Lin et al.
patent: 2004/0202969 (2004-10-01), Park et al.
patent: 2005/0230351 (2005-10-01), Tahara
patent: 2005/0247904 (2005-11-01), Raj et al.
patent: 2007/0082497 (2007-04-01), Lee et al.
patent: 2001-065459 (2001-03-01), None
patent: 2002-134468 (2002-05-01), None
patent: 2005-167181 (2005-06-01), None
patent: 1020020055888 (2002-07-01), None
patent: 1020020081923 (2002-10-01), None
patent: 1020040102981 (2004-12-01), None

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