Compositions – Compositions containing a single chemical reactant or plural... – Organic reactant
Patent
1995-12-27
1997-12-09
Miller, Edward A.
Compositions
Compositions containing a single chemical reactant or plural...
Organic reactant
2521823, C09K 300
Patent
active
056963840
ABSTRACT:
A Pt film-forming composition comprises a dimethyl Pt(II) (N,N,N',N'-tetramethylethylenediamine) complex and an organic solvent. A Pt film is formed by applying this composition to a substrate and then subjecting the applied layer of the composition to a heat treatment. A Pt film pattern is obtained by applying this composition to a substrate, pattern-exposing the produced applied layer of the composition to radiation, developing the exposed layer, and then subjecting the developed layer to a heat treatment.
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Appleton et al., Chem. Abs., 106, abs. #84805 (1986).
Itsuki Atsushi
Ogi Katsumi
Uchida Hiroto
Miller Edward A.
Mitsubishi Materials Corporation
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