Composition and method for removing copper-compatible resist

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...

Reexamination Certificate

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C510S175000, C510S201000, C510S505000, C510S506000, C134S002000, C134S902000

Reexamination Certificate

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06958312

ABSTRACT:
A composition for removing a copper-compatible resist includes about 10% to about 30% by weight of an amine compound, about 10% to about 80% by weight of a glycolether compound, and about 10% to about 80% by weight of a polar solvent.

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patent: 2003/0181344 (2003-09-01), Ikemoto et al.
patent: 2001-0018377 (2001-03-01), None

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