Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
Patent
1996-08-07
1997-08-05
Beck, Shrive
Coating processes
Coating by vapor, gas, or smoke
Carbon or carbide coating
427255, 427282, 136230, 136232, 136233, 118504, 118505, C23C 1632
Patent
active
056540345
ABSTRACT:
A semiconductor protection tube is a ceramic tube with a layer of silicon carbide covering at least a portion of the tube adjacent an open front end of the tube and extending forward of the open end to form a hollow, closed-end tip. The protection tube is formed by providing the ceramic tube, inserting a mandrel through the tube to extend forward of the front end, and depositing silicon carbide by chemical vapor deposition over at least a front portion of the ceramic tube and over the forward-extending portion of the mandrel. Subsequent removal of the mandrel completes the production of the protection tube.
REFERENCES:
patent: 3185131 (1965-05-01), Manning
patent: 3343589 (1967-09-01), Holzl
patent: 3950479 (1976-04-01), Reuschel et al.
patent: 5315092 (1994-05-01), Takahashi et al.
patent: 5382453 (1995-01-01), Mason
Burns Lee E.
Desai Hemant D.
Taylor Raymond L.
Tulloch Kenneth F.
Beck Shrive
CVD Incorporated
Meeks Timothy
Nacker Wayne E.
White Gerald K.
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