Stock material or miscellaneous articles – Composite – Of inorganic material
Reexamination Certificate
2009-02-09
2010-10-19
Speer, Timothy M (Department: 1784)
Stock material or miscellaneous articles
Composite
Of inorganic material
C428S701000, C428S702000, C428S426000, C428S457000, C428S469000
Reexamination Certificate
active
07816022
ABSTRACT:
A composite structure for microlithography, in particular a holding device for a wafer, has two or more components, the surfaces of which are bonded together at least at one bond. At least one of the components consists of cordierite (Mg2Al4Si5O18) or of silicon carbide (SiC). Also disclosed is an optical arrangement, in particular a projection illumination apparatus for microlithography, having at least one such composite structure, preferably a wafer stage.
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Ekstein Claudia
Holderer Hubert
Carl Zeiss SMT AG
Speer Timothy M
Sughrue & Mion, PLLC
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