Composite scanning tunneling microscope

Details Composite scanning tunneling microscope Composite scanning tunneling microscope

1992-07-29

1994-01-04

Hannaher, Constantine

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3700

Patent

active

052763242

ABSTRACT:
A composite scanning tunneling microscope comprises a first objective optical system for collimating an optical flux from a sample, a second objective optical system for condensing the optical flux thus collimated, and a transparent member disposed between the first and the second objective optical systems. A through hole is perforated along an optical axis in the center of the first objective optical system. A tube scanner member has a probe for detecting a tunnel current disposed at one end thereof. The tube scanner member passes through the hole of the first objective optical system without a contact therewith. The other end of the tube scanner member is fixed to the transparent member. The tube scanner member fixed to the transparent member is separate from and independent of an optical microscope, so that a tunnel current may stably be detected without influences on the probe from vibrations of the optical microscope.

REFERENCES:
patent: 4914293 (1990-04-01), Hayashi et al.
patent: 5083022 (1992-01-01), Miyamoto et al.
patent: 5206702 (1993-04-01), Kato et al.
Yasutake et al., "Scanning Tunneling Microscope Combined with Optical Microscope for Large Sample Measurement", Journal of Vacuum Science and Technology A, vol. 8, Jan. 1990, pp. 350-353.

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