Thermal measuring and testing – Temperature measurement – By a vibratory effect
Reexamination Certificate
2006-06-02
2010-10-05
Caputo, Lisa M (Department: 2855)
Thermal measuring and testing
Temperature measurement
By a vibratory effect
C374SE11011
Reexamination Certificate
active
07806586
ABSTRACT:
Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.
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Agarwal Manu
Chandorkar Saurabh
Hopcroft Matt
Kenny Thomas W.
Kim Bongsang
Caputo Lisa M
Crawford & Maunu PLLC
Dunlap Jonathan
The Board of Trustees of the Leland Stanford Junior University
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