Composite coatings

Details Composite coatings Composite coatings

2005-05-31

2005-05-31

Kopec, Mark (Department: 1751)

Compositions

Electrically conductive or emissive compositions

Elemental carbon containing

C204S192150, C204S192210, C204S298130

Reexamination Certificate

active

06899828

ABSTRACT:
The invention describes composite coatings, in particular comprising carbon and another metallic element such as silicon or aluminum. These coatings have improved properties compared with pure tetrahedral amorphous carbon coatings, in that they have reduced stress levels and can be deposited at higher thicknesses, while retaining acceptable hardness and other useful mechanical properties. Also described are methods of making composite coatings, materials for making the coatings and substrates coated therewith. Specifically, a method of applying a coating to a substrate using a cathode arc source, comprises generating an arc between a cathode target and an anode of the source and depositing positive target ions on the substrate to form the coating, wherein the coating is a composite of at least first and second elements and the target comprises said at least first and second elements. A composite coating comprises tetrahedral amorphous carbon and a metallic element other than carbon, the composite coating having an sp3content of at least 60%. A target for use in a cathode arc source comprises a mixture of carbon and a metallic element other than carbon.

REFERENCES:
patent: 3428541 (1969-02-01), Froemel et al.
patent: 4839011 (1989-06-01), Ramalingam et al.
patent: 4842710 (1989-06-01), Freller et al.
patent: 5474816 (1995-12-01), Falabella
patent: 5888430 (1999-03-01), Wakayama et al.
patent: 6031239 (2000-02-01), Shi et al.
patent: 54-129892 (1979-10-01), None
patent: 63-161101 (1988-07-01), None
patent: 63-186417 (1988-08-01), None
patent: 01-065092 (1989-03-01), None
patent: 2-292821 (1990-12-01), None
patent: 5-106022 (1993-04-01), None
patent: 6-10122 (1994-01-01), None
patent: 6-248445 (1994-09-01), None
patent: 7-157871 (1995-06-01), None
patent: 9-279334 (1997-10-01), None
patent: 2003-3258 (2003-01-01), None
patent: WO 96/26531 (1996-08-01), None
patent: WO 96/26532 (1996-08-01), None
patent: 01/14607 (2001-03-01), None
Dimigen, H., et al., “Tribological an electrical properties of metal-containing hydrogenated carbon films,”Appl. Phys. Lett.50:1056-1058 (Apr. 1987).
Fallon, P.J., et al., “Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy,”Phys. Rev. B48:4777-4782 (Aug. 1993).
Kumbhar, A.S., et al., “Growth of clean amorphous silicon-carbon alloy films by hot-filament assisted chemical vapor deposition technique,”Appl. Phys. Lett.66:1741-1743 (Apr. 1995).
Martin, P.J., et al., “Structure and hardness of diamond-like carbon films prepared by arc evaporation,”J. Mater. Sci. Lett.7:410-412 (1988).
McKenzie, D.R., et al., “Compressive-Stress-Induced Formation of Thin-Film Tetrahedral Amorphous Carbon,”Phys. Rev. Lett.67:773-776 (Aug. 1991).
Schwan, J., et al., “Raman spectroscopy on amorphous carbon films,”J. Appl. Phys.80:440-447 (Jul. 1996).
Wei, Q., et al., “Improvement of wear resistance of pulsed laser deposited diamond-like carbon films through incorporation of metals,”Mater. Sci. Engin. B53:262-266 (1998).
Xu, S., et al., “Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy,”J. Appl. Phys.79:7234-7240 (May 1996).
Xu, S., et al., “Mechanical properties and Raman spectra of tetrahedral amorphous carbon films with high sp3fraction deposited using a filtered cathodic arc,”Philos. Mag. B76:351-361 (1997).
Zhang, X., et al., “Optical study of silicon-containing amorphous hydrogenated carbon,”J. Appl. Phys.83:2620-2625 (Mar. 1998).

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