Compliant test probe with jagged contact surface

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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Details

C438S117000, C438S614000, C257S737000, C257S780000

Reexamination Certificate

active

06846735

ABSTRACT:
A test probe includes a conductive trace with a bumped terminal, the bumped terminal includes a jagged contact surface and a cavity that face in opposite directions, and the contact surface includes a plated metal. The contact surface is jagged due to particles which may protrude, be covered or dislodged. Preferably, the test probe includes an elastomer that fills the cavity so that the bumped terminal is compliant. The test probe is well-suited for pressure contact with semiconductor chips, BGA packages and other electronic devices.

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