Compliant interconnects for semiconductors and micromachines

Details Compliant interconnects for semiconductors and micromachines Compliant interconnects for semiconductors and micromachines

2008-05-27

2008-05-27

Zarneke, David A (Department: 2891)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified configuration

C257SE23078

Reexamination Certificate

active

10974219

ABSTRACT:
A compliant interconnect is described that is useful for coupling semiconductor dies to other components. In one embodiment, the interconnect includes a base to couple to a first component and an arch extending from and integral with the base to couple to a second component. The interconnect may be formed by coating a substrate with photoresist, exposing the photoresist with a defined pattern, developing the photoresist, baking the photoresist at a first temperature for a first amount of time to reflow the photoresist, and baking the photoresist at a second higher temperature for a second amount of time to reflow the photoresist.

REFERENCES:
patent: 3842189 (1974-10-01), Southgate
patent: 5139427 (1992-08-01), Boyd et al.
patent: 5152695 (1992-10-01), Grabbe et al.
patent: 5926951 (1999-07-01), Khandros et al.
patent: 6680536 (2004-01-01), Hattori et al.
patent: 6807064 (2004-10-01), Hedler et al.
patent: 6837719 (2005-01-01), Panella
patent: 6844214 (2005-01-01), Mei et al.
patent: 6873719 (2005-03-01), Holley
patent: 6888362 (2005-05-01), Eldridge et al.
patent: 6939143 (2005-09-01), Rathburn
patent: 7015584 (2006-03-01), Chow et al.
patent: 2002/0051351 (2002-05-01), Maurer et al.
Zhu et al., “Development of G-Helix Structure as Off-Chip Interconnect”, Journal of Electronic Packaging, Jun. 2004, vol. 126, pp. 237-246.

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