Complementary metal oxide semiconductor (CMOS) gate stack...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S412000, C257S310000

Reexamination Certificate

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06891231

ABSTRACT:
A diffusion barrier (and method for forming the diffusion barrier) for a field-effect transistor having a channel region and a gate electrode, includes an insulating material being disposed over the channel region. The insulating material includes nitrogen (N), and is disposed under the gate electrode. The insulating material can be provided either as a layer or distributed within a gate dielectric material disposed under the gate electrode.

REFERENCES:
patent: 5763922 (1998-06-01), Chau
patent: 6013553 (2000-01-01), Wallace et al.
patent: 6020024 (2000-02-01), Maiti et al.
patent: 6020243 (2000-02-01), Wallace et al.
patent: 6107667 (2000-08-01), An et al.
patent: 6277681 (2001-08-01), Wallace et al.
patent: 6340827 (2002-01-01), Choi et al.
patent: 6383873 (2002-05-01), Hegde et al.
patent: 6407435 (2002-06-01), Ma et al.
patent: 6429052 (2002-08-01), Gardner et al.
U.S. Appl. No. 09/755,164, filed Jan. 8, 2001.

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