Data processing: generic control systems or specific application – Specific application – apparatus or process – Mechanical control system
Reexamination Certificate
2006-01-26
2008-12-16
Decady, Albert (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Mechanical control system
C702S045000, C702S050000, C702S100000, C073S202000
Reexamination Certificate
active
07467027
ABSTRACT:
A thermal mass flow controller for controlling flow rate of a fluid includes a conduit configured to receive the fluid, a pressure sensor that measures the pressure of the fluid as the fluid flows within the conduit, a temperature sensor that measures the ambient temperature of the fluid, and a thermal sensor that generates an output representative of the flow rate of the fluid. The thermal mass flow controller further includes a control system configured to monitor the output from the thermal sensor, the pressure measured by the pressure sensor, and the ambient temperature measured by the temperature sensor, to regulate flow of the fluid within the conduit so as to compensate for a shift in the thermal sensor output caused by thermal siphoning.
REFERENCES:
patent: 3938384 (1976-02-01), Blair
patent: 4056975 (1977-11-01), LeMay
patent: 4100801 (1978-07-01), LeMay
patent: 5062446 (1991-11-01), Anderson
patent: 5191793 (1993-03-01), Drexel et al.
patent: 5279154 (1994-01-01), Vavra et al.
patent: 5763774 (1998-06-01), Ha et al.
patent: 6044701 (2000-04-01), Doyle et al.
patent: 6564824 (2003-05-01), Lowery et al.
patent: 6564825 (2003-05-01), Lowery et al.
patent: 6810308 (2004-10-01), Shajii et al.
patent: 6839643 (2005-01-01), Kanke et al.
patent: 6868862 (2005-03-01), Shajii et al.
patent: 6962164 (2005-11-01), Lull et al.
patent: 7000465 (2006-02-01), L'Bassi et al.
patent: 7004191 (2006-02-01), Shajii et al.
patent: 7222029 (2007-05-01), Larson
patent: 2003/0234048 (2003-12-01), Shajii et al.
patent: 2006/0009926 (2006-01-01), Larson
patent: WO 02/086632 (2002-10-01), None
PCT International Search Report for related PCT Application No. PCT/US2006/041153 (4 pages).
PCT Written Opinion of the International Searching Authority for related PCT Application No. PCT/US2006/041153 (6 pages).
Ding Junhua
L'Bassi Michael
Zarkar Kaveh H.
De'cady Albert
Lee Douglas S
MKS Instruments Inc.
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