Compensating masks, multi-optical systems using the masks,...

Details Compensating masks, multi-optical systems using the masks,... Compensating masks, multi-optical systems using the masks,...

2011-05-10

2011-05-10

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S071000, C355S077000

Reexamination Certificate

active

07940373

ABSTRACT:
Provided are a compensating mask, a multi-optical system using the compensating mask, and a method of compensating for a 3-dimensional (3-D) mask effect using the compensating mask. Methods of compensating for a 3-D mask effect using a compensating mask may include generating a first kernel corresponding to a normal mask used for forming a minute pattern, generating a second kernel corresponding to a compensating mask, mixing the first kernel corresponding to the normal mask with the second kernel corresponding to the compensating mask, and generating a multi-optical system kernel corresponding to mixing the first kernel and the second kernel.

REFERENCES:
patent: 6163367 (2000-12-01), Obszarny
patent: 6835507 (2004-12-01), Ki et al.
patent: 2007/0000884 (2007-01-01), Salama
patent: 2004-246223 (2004-09-01), None
patent: 1020060075099 (2006-07-01), None

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