Comparison type dimension measuring method and apparatus using a

Details Comparison type dimension measuring method and apparatus using a Comparison type dimension measuring method and apparatus using a

1983-11-30

1987-03-17

Rosenberger, R. A.

Optics: measuring and testing

By configuration comparison

With object being compared and light beam moved relative to...

356369, G01B 1100

Patent

active

046503358

ABSTRACT:
A comparison-type dimension measurement system in which a laser 1 provides linearly polarized light that is directed by a polarization beam splitter 5 into a microscope system in which a specimen 13 is mounted. The reflected polarized light is rotated 90.degree. by a quarter wave plate 9 and passes through the beam splitter to a multi-element line sensor 19. The laser light is scanned by a rotatable mirror 3 over the specimen. Threshold intensities are determined on indicia of known separation on a reference specimen and used to calibrate the distance measured by the line sensor.

REFERENCES:
patent: 3909602 (1975-09-01), Micka
patent: 4373817 (1983-02-01), Coates

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