Compact temperature-compensated tube-type scanning probe with la

Details Compact temperature-compensated tube-type scanning probe with la Compact temperature-compensated tube-type scanning probe with la

1991-05-02

1992-04-07

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250310, 250311, G01N 2300

Patent

active

051030942

ABSTRACT:
A scanning probe microscope includes a base, an inner piezoelectric tube, and an outer piezoelectric tube, with a first end of the outer piezoelectric tube connected to the base. A first end of the inner piezoelectric tube is rigidly connected to a second end of the outer piezoelectric tube. Thin inner conductors are disposed on the inner surfaces of the inner piezoelectric tube and the other piezoelectric tube, and quadrant conductors are disposed on the outer surfaces of the inner piezoelectric tube and the outer piezoelectric tube. Variable voltages are applied to the quadrant conductors of the outer piezoelectric tube and the inner piezoelectric tube and varied to cause lateral and axial movement of the second end of the outer piezoelectric tube and also to cause lateral and perpendicular movement of the second end of the inner piezoelectric tube relative to its first end. A probe having a tip is connected to the second end of the inner piezoelectric tube and scans the surface of a sample in response to the applied quadrant conductor voltages. A control system senses current or other parameter sensed by the tip of the probe and indicative of distance of the probe tip from the scanned surface to control application of the quadrant voltages.

REFERENCES:
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patent: 4798989 (1989-01-01), Miyazaki et al.
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patent: 4987303 (1991-01-01), Takase et al.
patent: 4992728 (1991-02-01), McCord et al.
"A Compact Scanning Tunnelling Microscope with Thermal Compensation", by Albrektsen et al., J. Phys. E. Sci. Instrum. 22 (1989), pp. 39-42.
"High-Stability Bimorph Scanning Tunnelling Microscope", by B. L. Blackford, D. C. Dahn, and M. H. Jericho, 1987 American Institute of Physics, Rev. Sci. Instrum. 58(8), Aug. 1987, pp. 1343-1348.

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