Compact temperature-compensated tube-type scanning probe with la

Details Compact temperature-compensated tube-type scanning probe with la Compact temperature-compensated tube-type scanning probe with la

1992-03-09

1992-12-22

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 310328, 310331, 310332, G01N 2300

Patent

active

051736055

ABSTRACT:
A scanning probe microscope includes a base, an inner piezoelectric tube, and an outer piezoelectric tube, with a first end of the outer piezoelectric tube connected to the base. A first end of the inner piezoelectric tube is rigidly connected to a second end of the outer piezoelectric tube. Thin inner conductors are disposed on the inner surfaces of the inner piezoelectric tube and the outer piezoelectric tube, and quadrant conductors are disposed on the outer surfaces of the inner piezoelectric tube and the outer piezoelectric tube. Separate x, y, and z scan control voltage signals are applied to various quadrant conductors of the inner and outer piezoelectric tubes to control scanning of the free end of the inner tube in the x, y, and z directions, respectively.

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"A Compact Scanning Tunnelling Microscope With Thermal Compensation", by Albrektsen et al., J. Phys. E. Sci. Instrum. 22 (1989), pp. 39-42.
"High-Stability Bimorph Scanning Tunneling Microscope", by B. L. Blackford, D. C. Dahn, and M. H. Jericho, 1987 American Institute of Physics, Rev. Sci. Instrum. 58(8), Aug., 1987, pp. 1343-1348.

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