Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1999-01-22
2000-05-09
Font, Frank G.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
G01J 318
Patent
active
060611294
ABSTRACT:
A compact high resolution grating spectrometer. A beam of expanding light from a light source is collimated and the collimated beam is expanded with a beam expander before illuminating a reflecting grating. The expansion of the beam permits high resolution in a small package. In preferred embodiments mirror arrangements are provided to produce double reflections off the reflecting grating to further improve the resolution of the spectrometer.
REFERENCES:
patent: 5285255 (1994-02-01), Baranne et al.
patent: 5589717 (1996-12-01), Chau
patent: 5757483 (1998-05-01), Pierce, III
patent: 5835210 (1998-11-01), Eshov
Das Palash P.
Ershov Alexander I.
Padmabandu Gamaralalage G.
Cymer Inc.
Font Frank G.
Lauchman Layla
Ross, Esq. John R.
LandOfFree
Compact high resolution grating spectrometer does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Compact high resolution grating spectrometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Compact high resolution grating spectrometer will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1070469