Compact atomic force microscope

Details Compact atomic force microscope Compact atomic force microscope

1989-11-28

1991-06-25

Raevis, Robert

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528

Patent

active

050256580

ABSTRACT:
This is an atomic force microscope in which the sensor can be built as a very small integrated structure. The sensor utilizes optical interference and can be operated in either the contact mode for high resolution or in the non-contact mode to measure electric and magnetic fields. One configuration of this microscope is a stand-alone configuration in which the microscope can be placed on or be suspended above large samples for sanning of small local areas thereof. The sensor is built into a scanner so that the sensor can be scanned over a stationary sample.

REFERENCES:
patent: H371 (1987-11-01), Bobb
patent: 3049002 (1962-08-01), Hediger
patent: 4724318 (1988-02-01), Binnig
patent: 4765181 (1988-08-01), Numoto et al.
patent: 4887032 (1989-12-01), Hetrick

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