Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1991-04-19
1993-03-02
Raevis, Robert
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528
Patent
active
051899060
ABSTRACT:
This is an atomic force microscope in which the sensor can be built as a very small integrated structure. The sensor utilizes optical interference and can be operated in either the contact mode for high resolution or in the non-contact mode to measure electric and magnetic fields. One configuration of this microscope is a stand-alone configuration in which the microscope can be placed on or be suspended above large samples for scanning of small local areas thereof. The sensor is built into a scanner so that the sensor can be scanned over a stationary sample.
REFERENCES:
patent: H371 (1987-11-01), Bobb
patent: 3049002 (1962-08-01), Hediger
patent: 4665739 (1987-05-01), Mizuno
patent: 4724318 (1988-02-01), Binnig
Elings Virgil B.
Gurley John A.
Sarid Dror
Digital Instruments, Inc.
Raevis Robert
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