Communication system used in semiconductor device manufacturing

Details Communication system used in semiconductor device manufacturing Communication system used in semiconductor device manufacturing

1994-05-19

1997-09-09

Chin, Stephen

Pulse or digital communications

Systems using alternating or pulsating current

371 70, H04L 2700

Patent

active

056663811

ABSTRACT:
A communication system used in a semiconductor device manufacturing equipment includes a master side transmission unit having a master transmitting logic module for transmitting information in an inverted two-successive transmission mode in which information having non-inverted information and inverted information of the non-inverted information as one pair is transmitted and a master receiving logic module, and a plurality of slave side transmission units respectively mounted on a plurality of process units of a cleaning apparatus of the semiconductor device manufacturing equipment and each having a slave transmitting logic module and a slave receiving logic module which receives the non-inverted information and inverted information, for fetching the information when the contents of the non-inverted information and inverted information coincide with each other.

REFERENCES:
patent: 4045771 (1977-08-01), Loreck
patent: 4070648 (1978-01-01), Mergenthaler et al.
patent: 4860286 (1989-08-01), Forsberg et al.
patent: 5431179 (1995-07-01), Miyazaki et al.

Affiliated with

Also associated with

Rating

Communication system used in semiconductor device manufacturing does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Communication system used in semiconductor device manufacturing , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Communication system used in semiconductor device manufacturing will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-74672