Combined use of oscillating means and ellipsometry to...

Optics: measuring and testing – By polarized light examination – Of surface reflection

Reexamination Certificate

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C356S630000

Reexamination Certificate

active

11404593

ABSTRACT:
A combined ellipsometer and oscillator system applied to a chamber for containing fluid, and method of decorrelated determination of thickness and optical constants of depostable materials present in a fluid. In use the ellipsometer determines the product of thickness and optical constant, and the oscillator system changes frequency of oscillation proportional to the thickness of material deposited upon a surface of an element therein.

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