Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2007-04-24
2007-04-24
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C356S630000
Reexamination Certificate
active
11404593
ABSTRACT:
A combined ellipsometer and oscillator system applied to a chamber for containing fluid, and method of decorrelated determination of thickness and optical constants of depostable materials present in a fluid. In use the ellipsometer determines the product of thickness and optical constant, and the oscillator system changes frequency of oscillation proportional to the thickness of material deposited upon a surface of an element therein.
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Welch James D.
Woollam John A.
J.A. Woollam Co. Inc.
Stafira Michael P.
Welch James D.
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