Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2006-04-18
2006-04-18
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C356S630000
Reexamination Certificate
active
07030982
ABSTRACT:
A combined ellipsometer and oscillator system and method of decorrelated determination of thickness and optical constants of deposted materials. In use the ellipsometer determines the product of thickness and optical constant, and the oscillator system changes frequency of oscillation proportional to the thickness of material deposited upon a surface of an element therein.
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Welch James D.
Woollam John A.
J.A. Woollam Co. Inc.
Stafira Michael P.
Welch James D.
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