Combined turbo-molecular pump

Details Combined turbo-molecular pump Combined turbo-molecular pump

1985-02-22

1987-04-07

Garrett, Robert E.

Rotary kinetic fluid motors or pumps

Runner has spirally arranged blade or fluid passage

415 90, F04D 1904

Patent

active

046556788

ABSTRACT:
A turbo-molecular pump has a housing containing a plurality of stationary plates which are alternately arranged with respect to a plurality of rotary plates connected to a rotationally driven rotor. Spiral flow grooves all having the same winding direction are formed on opposite sides of the stationary plates, and gas drawn through an inlet port of the housing flows downwardly through a plurality of axial passages formed in the stationary plates and then radially inwardly into the spiral flow grooves wherein the gas is compressed. Axial grooves in the rotor transport the compressed gas from the spiral flow grooves to a helical groove at the lower part of the housing which further compresses the gas and discharges the same through an outlet port.

REFERENCES:
patent: 1586160 (1926-05-01), Mavron et al.
patent: 1975568 (1934-10-01), Dubrovin
patent: 2954157 (1960-09-01), Eckberg

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