Combined spatial filter and relay systems

Details Combined spatial filter and relay systems Combined spatial filter and relay systems

2008-01-08

2008-01-08

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

07317530

ABSTRACT:
Low aberration relay systems modified to perform as spatial filters in reflectometer, spectrophotometer, ellipsometer, polarimeter and the like systems.

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patent: 2005/0286047 (2005-12-01), Boege
patent: WO 2005/077135 (2005-08-01), None

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