Combined scanning electron and scanning tunnelling microscope ap

Details Combined scanning electron and scanning tunnelling microscope ap Combined scanning electron and scanning tunnelling microscope ap

1991-02-11

1992-01-14

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 2504911, H01J 3728

Patent

active

050813536

ABSTRACT:
A sample is mounted on a support table adjacent a probe of a scanning tunnelling microscope, the support table permitting the sample to move relative to the probe. The probe is also movable in a direction generally perpendicular to the sample surface, between a withdrawn position and a scanning separation. A scanning electron microscope is located adjacent the sample and probe, and its electron beam scans both the sample and the probe and generates an image on a display from electrons from the sample detected by a detector. In order that that operator can position the probe on a target of a sample, for scanning by the probe, a marker is generated on the display by a graphics display unit, which marker indicates the probe-to-sample separation and preferably indicates the probe-to-sample approach point and the direction of movement of the probe towards the sample. The graphics display unit may alternatively, or in addition, generate a marker representing the scan area of the probe when it is moved to a scanning separation from the sample.

REFERENCES:
Binnig et al., Scanning Electron Microscopy, 1983 III, pp. 1079-1082.
Ichinokawa et al., Ultramicroscopy 23 (1987), pp. 115-118.
Vazquez et al., Rev. Sci. Instrum, 59(8), Aug. 1988, pp. 1286-1289.

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