Combination load lock for handling workpieces

Details Combination load lock for handling workpieces Combination load lock for handling workpieces

2006-05-12

2010-11-09

Adams, Gregory W (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

Reexamination Certificate

active

07828504

ABSTRACT:
A combination load lock apparatus is provided, wherein a chamber is coupled to two or more valves in selective fluid communication with two or more respective volumes. A support member for supporting a workpiece is disposed within an interior portion of the chamber, wherein a translation apparatus is operably coupled thereto. The translation apparatus is operable to rotate and/or translate the workpiece on the support member about and/or along a first axis, wherein a detection apparatus associated with the chamber is operable to detect one or more characteristics of the workpiece during the rotation and/or translation thereof. The workpiece may be further rotated in a predetermined manner based on the one or more detected characteristics. A recess is further defined in the interior portion of the chamber, wherein the translation apparatus is operable to translate the workpiece into and out of the recess to reduce particulate contamination thereon.

REFERENCES:
patent: 5308989 (1994-05-01), Brubaker
patent: 5611655 (1997-03-01), Fukasawa et al.
patent: 6090176 (2000-07-01), Yoshitake et al.
patent: 6215897 (2001-04-01), Beer et al.
patent: 6406598 (2002-06-01), Lee et al.
patent: 6585470 (2003-07-01), Van Der Meulen
patent: 6635115 (2003-10-01), Fairbairn et al.
patent: 6702865 (2004-03-01), Ozawa et al.
patent: 6742980 (2004-06-01), Sasaki
patent: 6847730 (2005-01-01), Beer et al.
patent: 6926012 (2005-08-01), Biberger et al.
patent: 6950721 (2005-09-01), Tashiro et al.
patent: 7012684 (2006-03-01), Hunter
patent: 2005/0118002 (2005-06-01), Kasumi
patent: 2006/0182539 (2006-08-01), Ozawa et al.
patent: 10223743 (1998-08-01), None

Affiliated with

Also associated with

Rating

Combination load lock for handling workpieces does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Combination load lock for handling workpieces, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Combination load lock for handling workpieces will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4174624