4. Gas separation
  5. Plural serial basically diverse separating media

Axcellis Technologies, Inc.

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Combination load lock for handling workpieces

Material or article handling – Apparatus for moving material between zones having different...
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Contaminant collector trap for ion implanter

Gas separation – Plural serial basically diverse separating media
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System and method for rapidly controlling the output of an...

Radiant energy – Ion generation – Electron bombardment type
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