Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1994-06-15
1996-03-05
Powell, William
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
1566331, 1566431, 1566561, 1566571, 437228, 437233, 437245, H01L 21306.5, H01L 2100
Patent
active
054964369
ABSTRACT:
A microfabricated, tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support electrodes and the sense electrodes are positioned at each end of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.
REFERENCES:
patent: Re32931 (1989-05-01), Staudte
patent: Re33479 (1990-12-01), Juptner et al.
patent: 3053095 (1962-09-01), Koril et al.
patent: 3251231 (1966-05-01), Hunt et al.
patent: 3370458 (1968-02-01), Dillon
patent: 3696429 (1972-10-01), Tressa
patent: 3913035 (1975-10-01), Havens
patent: 4044305 (1977-08-01), Oberbeck
patent: 4122448 (1978-10-01), Martin
patent: 4144764 (1979-03-01), Hartzell, Jr.
patent: 4155257 (1979-05-01), Wittke
patent: 4234666 (1980-11-01), Gursky
patent: 4321500 (1982-03-01), Paros et al.
patent: 4336718 (1982-06-01), Washburn
patent: 4342227 (1982-08-01), Petersen et al.
patent: 4381672 (1983-05-01), O'Connor et al.
patent: 4406992 (1983-09-01), Kurtz et al.
patent: 4411741 (1983-10-01), Janata
patent: 4414852 (1983-11-01), McNeill
patent: 4447753 (1984-08-01), Ochiai
patent: 4468584 (1984-08-01), Nakamura et al.
patent: 4478076 (1984-10-01), Bohrer
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 4483194 (1984-11-01), Rudolf
patent: 4484382 (1984-11-01), Kawashima
patent: 4490772 (1984-12-01), Blickstein
patent: 4495499 (1985-01-01), Richardson
patent: 4499778 (1985-02-01), Westhaver et al.
patent: 4502042 (1985-02-01), Wuhrl et al.
patent: 4522072 (1985-06-01), Sulouff et al.
patent: 4524619 (1985-06-01), Staudte
patent: 4538461 (1985-09-01), Juptner et al.
patent: 4585083 (1986-04-01), Nishiguchi
patent: 4590801 (1986-05-01), Merhav
patent: 4592242 (1986-06-01), Kempas
patent: 4596158 (1986-06-01), Strugach
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4600934 (1986-07-01), Aine et al.
patent: 4619001 (1986-10-01), Kane
patent: 4621925 (1986-11-01), Masuda et al.
patent: 4628283 (1986-12-01), Reynolds
patent: 4629957 (1986-12-01), Walters et al.
patent: 4639690 (1987-01-01), Lewis
patent: 4644793 (1987-02-01), Church
patent: 4651564 (1987-03-01), Johnson et al.
patent: 4653326 (1987-03-01), Danel et al.
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 4665605 (1987-05-01), Kempas
patent: 4670092 (1987-06-01), Motamedi
patent: 4671112 (1987-06-01), Kimura et al.
patent: 4674180 (1987-06-01), Zavracky et al.
patent: 4674319 (1987-06-01), Muller et al.
patent: 4674331 (1987-06-01), Watson
patent: 4679434 (1987-07-01), Stewart
patent: 4680606 (1987-07-01), Knutti et al.
patent: 4699006 (1987-10-01), Boxenhorn
patent: 4705659 (1987-11-01), Bernstein et al.
patent: 4706374 (1987-11-01), Murkami
patent: 4712439 (1987-12-01), North
patent: 4727752 (1988-03-01), Peters
patent: 4735506 (1988-04-01), Pavlath
patent: 4736629 (1988-04-01), Cole
patent: 4743789 (1988-05-01), Puskas
patent: 4744248 (1988-05-01), Stewart
patent: 4744249 (1988-05-01), Stewart
patent: 4747312 (1988-05-01), Herzl
patent: 4750364 (1988-07-01), Kawamura et al.
patent: 4761743 (1988-08-01), Wittke
patent: 4764244 (1988-08-01), Chitty et al.
patent: 4776924 (1988-10-01), Delapierre
patent: 4783237 (1988-11-01), Aine et al.
patent: 4789803 (1988-12-01), Jacobsen et al.
patent: 4792676 (1988-12-01), Hojo et al.
patent: 4805456 (1989-02-01), Howe et al.
patent: 4808948 (1989-02-01), Patel et al.
patent: 4834538 (1989-05-01), Heeks et al.
patent: 4851080 (1989-07-01), Howe et al.
patent: 4855544 (1989-08-01), Glenn
patent: 4869107 (1989-09-01), Murakami
patent: 4882933 (1989-11-01), Petersen et al.
patent: 4884446 (1989-12-01), Ljung
patent: 4890812 (1990-01-01), Chechile et al.
patent: 4893509 (1990-01-01), MacIver et al.
patent: 4898032 (1990-02-01), Voles
patent: 4899587 (1990-02-01), Staudte
patent: 4900971 (1990-02-01), Kawashima
patent: 4901586 (1990-02-01), Blake et al.
patent: 4916520 (1990-04-01), Kurashima
patent: 4922756 (1990-05-01), Henrion
patent: 4929860 (1990-05-01), Hulsing, II et al.
patent: 4981359 (1991-01-01), Tazartes et al.
patent: 5001383 (1991-03-01), Kawashima
patent: 5016072 (1991-05-01), Greiff
patent: 5025346 (1991-06-01), Tang
patent: 5038613 (1991-08-01), Takenaka et al.
patent: 5045152 (1991-09-01), Sickafus
patent: 5060039 (1991-10-01), Weinberg et al.
patent: 5090809 (1992-02-01), Ferrar
patent: 5094537 (1992-03-01), Karpinski, Jr.
patent: 5138883 (1992-08-01), Pacuet et al.
patent: 5195371 (1993-03-01), Greiff
patent: 5203208 (1993-04-01), Bernstein
patent: 5205171 (1993-04-01), O'Brien et al.
patent: 5216490 (1993-06-01), Greiff et al.
patent: 5226321 (1993-07-01), Varnham et al.
patent: 5233874 (1993-08-01), Putty et al.
patent: 5241861 (1993-09-01), Hulsing, II
J. Bernstein et al., "A Micromachined Comb-Drive Tuning Fork Rate Gyroscope", IEEE Micro Electro Mechanical Systems, IEEE Catalog No. 93CH3265-6, .COPYRGT.1993, pp. 143-148.
Barth, P. W. et al., "A Monolithic Silicon Accelerometer With Integral Air Damping and Overrange Protection," 1988 IEEE, pp. 35-38.
Boxenhorn, B., et al., "An Electrostatically Rebalanced Micromechanical Accelerometer," AIAA Guidance, Navigation and Control Conference, Boston, Aug. 14-16, 1989, pp. 118-122.
Boxenhorn, B., et al., "Micromechanical Inertial Guidance System and its Application," Fourteenth Biennial Guidance Test Symposium, vol. 1, Oct. 3-5, 1989, pp. 113-131.
Boxenhorn, B., et al., "Monolithic Silicon Accelerometer," Transducers '89, Jun. 25-30, 1989, pp. 273-277.
Boxenhorn, B., et al., "A Vibratory Micromechanical Gyproscope," AIAA Guidance, Naviagation and Control Conference, Minneapolis, Aug. 15-17, 1988, pp. 1033-1040.
Howe, R., et al., "Silicon Micromechanics: Sensors and Actuators On a Chip," IEEE Spectrum, Jul. 1990, pp. 29-35.
Moskalik, L., "Tensometric Accelerometers with Overload Protection," Meas. Tech (USA), vol. 22, No. 12, Dec. 1979 (publ. May 1980), pp. 1469-1471.
Nakamura, M., et al., "Novel Electrochemical Micro-Machining and Its Application for Semiconductor Acceleration Sensor IC," Digest of Technical Papers (1987) Institute of Electrical Engineers of Japan, pp. 112-115.
Petersen, K. E. et al., "Micromechanical Accelerometer Integrated with MOS Detection Circuitry," IEEE, vol. ED-29, No. 1 (Jan. 1982), pp. 23-27.
Petersen, Kurt E., et al., "Silicon as a Mechanical Material," Proceedings of the IEEE, vol. 70, No. 5, May 1982, pp. 420-457.
"Quartz Rate Sensor Replaces Gyros," Defense Electronics, Nov. 1984, p. 177.
Rosen, Jerome, "Machining In the Micro Domain," Mechanical Engineering, Mar. 1989, pp. 40-46.
Teknekron Sensor Development Corporation, article entitled "Micro-Vibratory Rate Sensor," 1080 Marsh Road, Menlo Park, Calif. 94025, 2 pages, undated.
Bryzek, Janusz et al., "Micromachines on the March," IEEE Spectrum, May 1994, pp. 20-31.
Bernstein Jonathan J.
Weinberg Marc S.
Powell William
The Charles Stark Draper Laboratory Inc.
LandOfFree
Comb drive micromechanical tuning fork gyro fabrication method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Comb drive micromechanical tuning fork gyro fabrication method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Comb drive micromechanical tuning fork gyro fabrication method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1410443