Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-07-17
2007-07-17
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C355S053000, C378S034000, C359S618000
Reexamination Certificate
active
11243403
ABSTRACT:
There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.
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European Search Report dated Feb. 1, 2006 in connection with European Patent App. No. EP01128685.
Egle Wilhelm
Hainz Joachim
Melzer Frank
Singer Wolfgang
Wangler Johannes
Carl Zeiss SMT AG
Nguyen Kiet T.
Ohlandt Greeley Ruggiero & Perle L.L.P.
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