Collector having unused region for illumination systems...

Details Collector having unused region for illumination systems... Collector having unused region for illumination systems...

2006-03-21

2006-03-21

Lee, John R. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S492200, C250S494100

Reexamination Certificate

active

07015489

ABSTRACT:
There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.

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