Optical: systems and elements – Mirror – Plural mirrors or reflecting surfaces
Reexamination Certificate
2005-11-15
2005-11-15
Dunn, Drew A. (Department: 2872)
Optical: systems and elements
Mirror
Plural mirrors or reflecting surfaces
C359S357000, C359S857000, C359S864000
Reexamination Certificate
active
06964485
ABSTRACT:
There is provided a collector for guiding light with a wavelength of ≦193 nm onto a plane. The collector includes a first mirror shell for receiving a first ring aperture section of the light and irradiating a first planar ring section of the plane with a first irradiance, and a second mirror shell for receiving a second ring aperture section of the light and irradiating a second planar ring section of the plane with a second irradiance. The first and second mirror shells are rotationally symmetrical and concentrically arranged around a common axis of rotation, the first and second ring aperture sections do not overlap with one another, the first planar ring section substantially abuts the second planar ring section, and the first irradiance is approximately equal to the second irradiance.
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Singer Wolfgang
Wangler Johannes
Carl Zeiss SMT AG
Dunn Drew A.
Ohlandt Greeley Ruggiero & Perle
Pritchett Joshua L.
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