Collector for an illumination system

Details Collector for an illumination system Collector for an illumination system

2011-03-22

2011-03-22

Souw, Bernard E (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S493100, C250S503100

Reexamination Certificate

active

07910900

ABSTRACT:
Collectors with mirror shells arranged inside each other, illumination systems equipped with such collectors, projection exposure apparatuses equipped with such illumination systems, methods of manufacturing microelectronic components with such projection exposure apparatuses, and related systems, components and methods are disclosed.

REFERENCES:
patent: 7015489 (2006-03-01), Singer et al.
patent: 2004/0065817 (2004-04-01), Singer et al.
patent: 2005/0094764 (2005-05-01), Weiss
patent: 2005/0195506 (2005-09-01), McGuire
patent: 101 38 313 (2002-07-01), None
patent: 1225481 (2002-07-01), None
patent: 1389747 (2004-02-01), None

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