Coating apparatus – Gas or vapor deposition
Patent
1998-03-31
2000-05-23
Meeks, Timothy
Coating apparatus
Gas or vapor deposition
62 555, 55355, 118724, C23C 1600
Patent
active
060662093
ABSTRACT:
The invention relates to an apparatus and process for filtering deposition gases in a substrate processing system. Particularly contemplated is an apparatus and process for the filtering deposition gases of a metal-oxide film deposited on a silicon wafer to make integrated circuits. In one embodiment, the invention provides an apparatus for filtering a fluid in a semiconductor processing system, comprising a housing and a filtering member disposable in the housing, the filtering member comprising a base portion and a filtering portion having an inlet and an outlet and a plurality of temperature controlled fluid passages formed between the inlet and the outlet, the passages having a length longer than a width across the passages.
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Dornfest Charles
Ku Vincent
Sajoto Talex
Zhao Jun
Applied Materials Inc.
Meeks Timothy
Torres-Velazquez Norca L.
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