Coil configurations for improved uniformity in inductively coupl

Details Coil configurations for improved uniformity in inductively coupl Coil configurations for improved uniformity in inductively coupl

1995-03-27

1996-11-26

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

216 68, 20419212, 20419232, 427569, H05H 100

Patent

active

055781659

ABSTRACT:
The present invention relates to a method for generating a low pressure plasma circulating in a planar direction within a process enclosure. The invention generates plasma having substantially uniform density characteristics across a planar axis. The invention achieves improved uniformity of the plasma density by delivering more radio frequency power toward the periphery of the circulating plasma than toward the center of the plasma. Increasing the periphery power to the circulating plasma compensates for increased plasma losses due to interaction with the side walls of the process containment enclosure.

REFERENCES:
patent: 5401350 (1995-03-01), Patrick et al.

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