Coaxial illumination system

Details Coaxial illumination system Coaxial illumination system

2005-03-01

2005-03-01

Smith, Zandra V. (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

C356S319000, C356S328000, C356S364000, C356S369000, C356S445000, C250S225000, C250S494100, C250S578100, C362S227000

Reexamination Certificate

active

06862090

ABSTRACT:
A method and apparatus for combining the spectral outputs of multiple light sources to provide a high-efficiency broad-band illuminator for optical metrology is disclosed. The illuminator combines the output radiation from a plurality of broad-band lamps in a novel optical arrangement that creates a virtual source and avoids the use of beam-splitters. Consequently, the illuminator offers increased performance at reduced cost. The illuminator can be optimized and configured for application in a broad class of optical metrology instruments.

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Hamamatsu Brochure, “Light Source,” printed for Hamamatsu Photonics K.K., Jul. 1998, 20 pages in length.
Hamamatsu Brochure, “UV-VIS Fiber Light Source L7893 Series,” printed for Hamamatsu Photonics K.K., Sep. 1999, 2 pages in length.
Hamamatsu Brochure, “L2D2 Lamps,” printed for Hamamatsu Photonics K.K., Aug. 1998, 12 pages in length.

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