Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1989-07-10
1990-11-20
Nguyen, Nam X.
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419214, 20419223, C23C 1440
Patent
active
049716735
ABSTRACT:
The invention relates to a continuous process for coating bundles of fibers, particularly carbon fibers, with a layer of silicon--which may be present as the carbide, oxide, nitride, or plasma polymer with carbon and hydrogen or in elementary form--by radio-frequency sputtering. The coated fibers are suitable in particular for the manufacture of reinforced plastics.
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Nagel Gerd
Weisweiler Werner
BASF - Aktiengesellschaft
Nguyen Nam X.
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