Coating electronic substrates with silica derived from polycarbo

Details Coating electronic substrates with silica derived from polycarbo Coating electronic substrates with silica derived from polycarbo

1996-04-29

1998-08-04

Geist, Gary

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Insulative material deposited upon semiconductive substrate

427 96, 428446, H01L 202

Patent

active

057893250

ABSTRACT:
A silica-containing coating is formed on an electronic substrate by applying a polycarbosilane on the substrate and converting it to a silica-containing material by heating in an oxidizing environment. The resultant thick planarizing coatings are useful as protective coatings and dielectric inner layers.

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