Coating apparatus – Gas or vapor deposition – Work support
Patent
1996-10-01
1998-07-07
Breneman, R. Bruce
Coating apparatus
Gas or vapor deposition
Work support
118500, 20429827, 20429828, C23C 1600
Patent
active
057762562
ABSTRACT:
A optical surface is mounted on a mirror rotating system having a carousel therein having gears which rotates said optical surface in a circular path while the optical surface itself rotates about an axis. The radius between the mirror support and the planetary gear is adjustable. The system is mounted on support legs within the vacuum chamber so that the optical surface can face downward when the apparatus is placed in a bell jar (or any such environment which provides a vacuum). A source of vaporized substance is placed under the apparatus, so that the optical surface, facing downward, is facing said source. This arrangement allows for an improvement in the uniformity of the substance deposited on the optical surface.
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Born Terry D.
O'Connell Daniel
Breneman R. Bruce
Collier Stanton E.
Lund Jeffrie R.
The United States of America as represented by the Secretary of
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