Coating apparatus and operating method thereof

Details Coating apparatus and operating method thereof Coating apparatus and operating method thereof

2009-09-22

2011-11-08

Parker, Frederick (Department: 1715)

Coating processes

Measuring, testing, or indicating

Reexamination Certificate

active

08053021

ABSTRACT:
A coating apparatus and an operating method thereof that prevent damage to the nozzle of a spinless coater from impurities on a substrate during resin coating of the substrate, and impurities remaining on a stage at the bottom of the substrate. The coating apparatus comprises a stage, a nozzle, a nozzle cleaner, and a stage cleaner. A substrate is placed upon the stage. The nozzle discharges resin on the substrate to perform coating. The nozzle cleaner cleans the nozzle. The stage cleaner cleans the stage. The operating method includes removing a coated first substrate from atop a stage, cleaning the stage using a stage cleaner, introducing a second substrate to be coated onto the cleaned stage, and discharging resin through a nozzle onto the second substrate and coating the second substrate.

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