Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1986-04-16
1987-06-23
Demers, Arthur P.
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419212, 2041923, 252521, 313346R, C23C 1400
Patent
active
046750916
ABSTRACT:
A thermionic cathode fabricated by cosputtering alkaline earth oxide and al powders under temperature and pressure conditions that ensure a metal particle size in a preferred range.
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Ritz Victor H.
Thomas Richard E.
Demers Arthur P.
Forrest John L.
Lesniak Andrew M.
United States of America as represented by the Secretary of the
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