Co-sputtered thermionic cathodes and fabrication thereof

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

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Details

20419212, 2041923, 252521, 313346R, C23C 1400

Patent

active

046750916

ABSTRACT:
A thermionic cathode fabricated by cosputtering alkaline earth oxide and al powders under temperature and pressure conditions that ensure a metal particle size in a preferred range.

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patent: 4407709 (1983-10-01), Enjouji et al.
patent: 4411827 (1983-10-01), Corneille
patent: 4412942 (1983-11-01), Naarmann
patent: 4465577 (1984-08-01), Tanielian
patent: 4518890 (1985-05-01), Taguchi

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